ASML

Introduction

Within the EUV source of ASML’s most sophisticated lithography machine small tin droplets are hit by a very powerful laser. To further improve the productivity of the tool (i.e. wafers per day produced), precise high-bandwidth actuated mirror control is required to accurately position the laser on the droplets.

The metrology used for the mirror control loops measures the laser pulses at non-uniform time instants due to EUV energy control strategies and droplet jittering. Besides the non-uniformity in the acquisition the sample frequency of the metrology is different from the sample rate of the controller, for which decimation is required. And, lastly, several of the sample data points may be flagged invalid.

Your assignment

Your assignment is to investigate multiple methodologies to optimally translate the high frequent non-uniform metrology data towards the fixed sample rate controller and evaluate the performance of the different strategies in terms of delay and information loss. You are expected to analyze these strategies by using a simulation in for example MATLAB, perform a theoretical assessment and consider the impact of implementing the signal processing block on an FPGA. You will be collaborating with Electronics development and Mechatronics development.

This is a bachelor & master apprentice or thesis internship for 5 to 9 months, minimum 5 days per week (3 days on-site). The start date of this internship is as soon as possible.

Your profile

To be a match for this internship, you:

• Are a student within Electrical Engineering or something related;
• Are proficient in MATLAB & Simulink;
• Are able to work in a multidisciplinary team;
• Are able to explain the technical details to someone unfamiliar with this technology;
• Are proactive, self-propelling and critical of your own work;
• Have affinity with digital signal processing and control.

Other requirements you need to meet

• You are enrolled at an educational institute for the entire duration of the internship;
• You need to be located in the Netherlands to be perform your internship. In case you ‘re currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate.
• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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