The functional group of EUV Dose Control focuses on delivering the accurate amount of requested energy for wafer exposure. The teams deploy various types of sensors to measure, calibrate and control EUV light at source, reticle and wafer levels. We also design control mechanisms to solve energy drift, offset and repeatability issues.
Dose control is an important function in the scanner. It controls the dosage of light on the wafer which matters with imaging quality. It also monitors the light transmission throughout the system to understand the optics degradation mechanism. Dose control represents many detailed sub-functions, from driver to integrated levels. Each sub-function requires a simulation environment (MATLAB) in order to trouble shoot issues on the system and to test offline before releasing production code to the system. The challenges are: 1) not every sub-function has a mature simulation environment; 2) not every sub-function has the same scripting style.
Your task is to build a toolbox that converts all existing sub-functions into a universal style (same variable calling, I/O struct, etc.). You will also have the chance to construct a new sub-function and integrate it into the toolbox. In this internship, you will build a solid physical understanding of control theory. You will also learn plasma physics principles, illumination mechanisims, sensor design, etc.
This is a Bachelor/Master apprentice internship for 4 to 12 months, 5 days per week. The start date of this internship is around September.
To be a fit for this assignment, you:
Other requirements you need to meet:
This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.
ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.
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