ASML

Introduction

Wafer stage, as an important module of ASML’s lithography machine, plays a crucial role in achieving high-acceleration motion and nano-meter performance. To mitigate the stage-induced vibration, an effective balance mass system has been commonly used. For the next generation wafer stage, new motion characteristics will be introduced, meaning the balance mass needs to be redesigned accordingly. In this assignment, we are aiming to design a new balance mass system for the new wafer stage, and to build a (simplified) dynamical model for analyzing system dynamics behavior. The new modular design would enable better system dynamics for improved performance, under a few challenging boundary conditions on volume, cost of goods, and stability

Your assignment

• investigate existing (mechanical) design & requirements, and literature study on state of the art;
• make conceptual design for a new balance mass system, and evaluate aspects including but not limited to

manufacturability, mechanical behavior and stability, costs;

• create models for dynamics analysis and design optimization;
• create detailed designs and mitigate risks/impacts.
• document relevant findings and conclusions.

This is a Master graduation internship for 9 to 12 months (40 hours a week), starting in September 2025.

Your profile

You:

• Are a Master student in Mechanical/Mechatronics Engineering/Applied Physics
• Have experience with precision mechanics
• Have knowledge of system dynamics and control and are familiar with CAD modeling, FEM (Ansys, Comsol, Abaqus or equivalent) and MATLAB
• Have proficient communication skills in English and basic scientific writing/presentation skills

What we find important is: being proactive, curiosity, teamwork, critical thinking, embracing new challenges, endurance and goal-oriented

Other information

• You are enrolled at an educational institute for the entire duration of the internship;
• You need to be located in the Netherlands to be able to perform your internship. In case you ‘re currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate.
• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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