ASML

Introduction

Defectivity remains one of the biggest challenges to overcome to improve scanner performance and availability. Defectivity analysis focusses on analyzing and troubleshooting ASML scanner performance limitations due to defects inside the scanner on wafers, reticles and scanner parts that are critical for the final product (chip). The Defectivity & Optics Lifetime Performance department consists of multiple groups focused on Defectivity Analysis. In the Defectivity Metrology & Software group we work on detecting, analyzing and repairing/preventing polluting defects in ASML scanner products, both by using defect metrology and by developing defectivity software. One part of the group provides/guides the presence of hardware equipment needed to detect and measure wafer and reticle (mask) defects. The other part of the group develops software data analysis software, data pipelines and dashboards used by defectivity engineers/analysts to support analysis and understanding of found defects. The challenge is the continued search for ever smaller particles/pollutants to measure, analyze and interpret.

Your Assignment

This internship is about conducting a simulation study of laser scattering on defects with different materials, morphologies, sizes, substrates, and orientations. Your goal is to understand the working principle of defect inspection tools by simulating the light scattering of defects on substrate.

Your main tasks will include:

• Explore existing simulation packages;
• Check defect types: materials, morphologies, orientations vs. incident angle;
• Look into substrate types;
• See the differences between detector types: PMT, TDI, etc.
• Explore other factors: laser wavelength, apertures, etc;
• Help design the stain classification;
• Finalize the study and present the final results.

This is a Master graduation/apprentice internship for around 6 months, 5 days per week (3 days onsite). The start date of this internship is around September 2025.

Your profile

To be a fit for this assignment, you:

• Are busy with your master's in Physics;
• Have preferably some experience with laser scatterometry;
• Have some experience with conducting literature studies and scientific reporting;
• Possess analytical skills and scalable thinking;
• Have good communication skills in English (verbal and written).

Other requirements you need to meet:

• You are enrolled at an educational institute for the entire duration of the internship;
• You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate;
• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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