ASML

Introduction

In the Laser Beam Quality team, we work on part of the extreme ultraviolet (EUV) machine in the SF15 cluster, where laser light is generated and transported to vessel for EUV light generation. The beam delivered to the vessel has to adhere to quality specifications to secure efficient EUV generation. Some basics are explained here: https://youtu.be/5yTARacBxHI?si=FUs_pbDcZ_NEV8FF

Your Assignment

Within our team, we have two internship assignments available, and we are looking to hire two interns.

Internship assignment 1: Laser Beam Quality Fleet Analysis

Data from the system fleet is continuously streamed, which allows for system performance analysis by the Development & Engineering department. In this internship assignment, your goal is to investigate and visualize the laser beam quality in the vessel. Tools, infrastructure and support to access and process data are available, your challenge will be to leverage the available tooling to gain new insights in fleet wide laser beam quality system performance. The assignment may include the following tasks:

• Understand the relevant parameters and their connection to system performance;
• Leverage existing (Python) tooling to visualize fleet performance for these parameters;
• Correlate beam quality performance with system performance;
• Investigate best and/or worst in class performers to find root-causes for untypical beam quality;
• Document your work in a written report and present your findings.

Internship assignment 2: Laser Beam Quality Characterization

Specifications for the laser pulse in the vessel are typically defined in fixed system contexts that do not always accurately represent the operational state of the system. Therefore, more specific beam quality specifications are a crucial next step for understanding and improving system performance. Therefore, your internship assignment may include the following tasks:

• Understand the relevant specifications including metrics (i.e. D4s vs EIGB beam size) and context (i.e. thermal state of the system);
• Analyze system data to understand if and how beam quality (beam profile for example) behaves in different contexts (requires physical optics propagation knowledge and ability to perform optical simulations) (MATLAB);
• Propose use of new metrics and/or improved qualification strategy to secure optimal system performance in operational state, and quantify the gain by applying the proposed strategy on system data;
• Document your work in a written report and present your findings.

Both of these assignments are suitable for a Master graduation/apprentice internship for 6 to 12 months, working minimum 4 days per week (2-3 days onsite). The start date of this internship is as soon as possible.

Your profile

To be a fit for this assignment, you:

• Are busy with your master's in Physics, Optics or a related field;
• Have a basic understanding of Laser Physics;
• Have an affinity with physical optics propagation and be able to perform optical simulations;
• Are skilled in Python and/or MATLAB;
• Are proactive and have a hands-on mentality;
• Have good communication skills in English (verbal and written).

Other requirements you need to meet:

• You are enrolled at an educational institute for the entire duration of the internship;
• You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate;
• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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